Optical coating machine is composed of vacuum coating machine, vacuum pump and Chamber Group Limited (electric cabinet control cabinet, electron gun armature), which is widely used in microelectronics, optical film, surface decoration, civil engineering and other fields.
Optical coating equipment in the prevention of oil pollution and shorten the work cycle and other aspects of superior performance.
The working principle of the Optical coating equipment is to heat the metal or non-metal material to the appropriate temperature by using an electron beam in a high vacuum state. The mean free path of the vapor source is larger than that of the evaporated substrate, and the vaporized steam molecules are directed toward the surface.
Optical coating machine maintenance and maintenance of the main gun replacement installation and maintenance, repair and maintenance, optical equipment cleaning and maintenance.
一、Installation and maintenance of electron gun
The electron gun control system is composed of an electron gun filament power supply, a high voltage power supply, a scanning power supply, a crucible driving power source and an evaporation source.
The electron gun control of armature contains high pressure, before work must ensure the normal operation of each door interlock device, non professionals can not open the door of the electron gun can not open the armature, the electrical cabinet door at work, the whole cabinet must have good grounding and grounding and connecting machine.
The electron gun evaporation source installed in the vacuum chamber on the floor, must have a good grounding effect and floor installation, evaporation source must be used stainless steel screws, there shall be no less than 200mm around the magnetic objects, otherwise it will affect the electron gun beam into tables, resulting in electronic performance bad. The electronic gun baffle plate should be installed on the 30mm of the crucible of the evaporation source, so as not to affect the emission of the electron beam.
The electron gun evaporation source is a precision machining body, it must be guaranteed to have good cooling water, such as the high temperature will affect the formation of the electron beam and the performance of the sealing ring.
（一）Electron gun head
The installation of the gun head directly affects the normal operation of the electronic gun, and its failure is related to the 90% electron gun head.
When the electron gun gun is used for a period of time, the forming and the power of the electron beam can be affected by the pollution of the components.
（二）Crucible maintenance
Steam source loading and unloading sequence：
1.Two cooling water connection pipe.
2. screw out the gun head and connect the high voltage line with two screws.
3. split crucible transmission connecting seat and coupling.
4. screw down the steam source four fixed screws.
5. carries the steam source to a stable and smooth working table.
6. remove the crucible cover plate four screws, remove the cover plate clean.
7. check whether or not the two sealing rings above the cover plate need to be replaced.
8. turned the evaporator upside down and put the board on the crucible.
9. unscrew the four screws fixed crucible rotation
10. raise the evaporation source, remove the
11. crucible the crucible is inverted, eight screws under the crucible bottom cover, clean the dirt inside, near the seals need to be checked.
14. four screw a screw screw
13.
12. unscrew the aqueduct under the crucible rotation mechanism and the crucible cover plate connection out of the crucible rotation axis, the axis of rotation of the seal check whether the need to change the
15. crucible clean installation. The installation is carried out according to the inverted order.
(three) the maintenance of magnetic guide plate and scanning ring
The magnetic guide plate and the permanent magnet do not need to be disassembled and maintained frequently, if need to be disassembled, please pay attention to the direction of the permanent magnet and the direction of the guide plate. Because of the space of the coil compacting installation, please do not use hard sharp things to leveraging, or they may cause damage.
Two, maintenance and maintenance of optical path
Optical path adjustment is a prerequisite to ensure stable DC power supply, the modulated light source, optical fiber, grating monochromator, photoelectric conversion amplifier, optical film thickness gauge and the special cable is intact and correct access. In particular, the switching point of the photoelectric conversion amplifier and the optical film thickness measuring instrument must be independently attached to the host machine.
Three, Optical coating machine cleaning
The equipment after one week (three classes), because the coating material except plating on the surface of the workpiece, but also because there is no directional and liner in the studio on the coating material, and the plating thickness of the layer thickness due to tissue, wound loose, absorb a large amount of gas caused by vacuum coating equipment, pumping more and more slow. At this time, to deal with the studio and the lining board for cleaning, if not necessary to remove the drop in the available components, sandpaper clean, liner can be soaked in aqueous hydrofluoric acid, hydrofluoric acid and the ratio of water to see the length of time soaking and does not hurt the lining for the principle. Note: the liner must be installed before drying, drying, lining water to wipe dry, clean with sandpaper work frame and other parts, need to clean up all the dust in the vacuum chamber, the vacuum cleaner can clean the dust suction. At the end of the installation of the liner, the vacuum chamber and the liner should be cleaned with alcohol. Due to the use of electron gun and ion source assisted deposition, may cause difficult to clean, can be used to clean the blasting method.
Four, Optical coating machine maintenance
(a) diffusion pump oil diffusion pump oil used for a period of time changed regularly, about two months (two), due to the long-term high temperature environment, although the high vacuum diffusion pump to start, there is still residual oxygen and other ingredients and make the oil diffusion reaction diffusion pump oil under high temperature may also have cracking, decrease the quality, and prolong the pumping time. When we think the time is too long, it should be replaced.
(two) mechanical vacuum pump oil, pump oil pump maintenance in two months, the oil will change. Because oil may be pumped into water, impurities and other reasons, and the use of oil viscosity change, vacuum down, it is necessary to replace. Such as the new equipment, the use of the first half of the month should be replaced, because in the run in period, the oil containing more iron powder, will increase wear.
(three) clean and sanitary equipment and its surrounding environment on a regular basis to do a good job, often keep clean inside and outside the equipment, the equipment around the environment, there is a good working environment to ensure safety.